Title :
MFM quantification of magnetic fields generated by ultra-small single pole perpendicular heads
Author :
Khizroev, S.K. ; Jayasekara, W. ; Bain, J.A. ; Jones, R.E., Jr. ; Kryder, M.H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
The perpendicular fields emanating from an ultra small perpendicular single pole heads have been quantified using a new MFM field mapping technique. This technique utilizes two MFM tips with different field sensitivities which have been focused ion beam etched to identical geometries. This technique has been used to quantify the perpendicular fields around a 100×200 nm pole, also fabricated with focused ion beam etching
Keywords :
focused ion beam technology; magnetic fields; magnetic force microscopy; perpendicular magnetic recording; sputter etching; 100 nm; 200 nm; MFM quantification; field mapping technique; field sensitivities; focused ion beam etching; magnetic fields; ultra-small single pole perpendicular heads; Etching; Ion beams; Magnetic field measurement; Magnetic fields; Magnetic force microscopy; Magnetic heads; Magnetic recording; Perpendicular magnetic recording; Scanning electron microscopy; Shape;
Journal_Title :
Magnetics, IEEE Transactions on
