DocumentCode
1416012
Title
Measured attenuation of coplanar waveguide on CMOS grade silicon substrates with polyimide interface layer
Author
Ponchak, G.E. ; Katehi, L.P.B.
Author_Institution
NASA Lewis Res. Center, Cleveland, OH, USA
Volume
34
Issue
13
fYear
1998
fDate
6/25/1998 12:00:00 AM
Firstpage
1327
Lastpage
1329
Abstract
The measured propagation constant of a coplanar waveguide on CMOS grade silicon with a polyimide interface layer is presented. It is shown that the transmission line can have an attenuation comparable to other transmission lines on Si substrates if the proper polyimide thickness is used
Keywords
MMIC; UHF integrated circuits; coplanar waveguides; polymer films; silicon; substrates; CMOS grade Si substrates; CPW/polyimide layer/Si substrate; Si; Si MMICs; Si RFICs; attenuation; coplanar waveguide; polyimide interface layer; propagation constant; transmission line;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980840
Filename
707246
Link To Document