• DocumentCode
    1416156
  • Title

    Integrated array of gas sensors

  • Author

    Anisimkin, V.I. ; Krystal, R.G. ; Medved, A.V. ; Verona, E. ; Zemlyakov, V.E.

  • Author_Institution
    Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
  • Volume
    34
  • Issue
    13
  • fYear
    1998
  • fDate
    6/25/1998 12:00:00 AM
  • Firstpage
    1360
  • Lastpage
    1361
  • Abstract
    A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction
  • Keywords
    gas sensors; pattern recognition; surface acoustic wave sensors; ST-cut quartz substrate; SiO2; gas sensors; mechanical displacement components; pattern recognition purposes; propagation direction; sorbent film; surface acoustic wave multi-channel sensor array;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19980927
  • Filename
    707269
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1416156