Integrated optics in silicon and SiGe-heterostructures

Author

Schüppert, Bernd ; Schmidtchen, Joachim ; Splett, Armin ; Fischer, Uwe ; Zinke, Thomas ; Moosburger, Rudolf ; Petermann, Klaus

Author_Institution

Fachgebiet Hochfrequenztech., Tech. Univ. Berlin, Germany

Volume

14

Issue

10

fYear

1996

fDate

10/1/1996 12:00:00 AM

Firstpage

2311

Lastpage

2323

Abstract

This paper reviews various techniques and ideas in the field of integrated optics in silicon, mainly focused on silicon in conjunction with germanium. We will discuss different approaches for waveguides, passive and active components in silicon as well as recent developments in the fabrication and performance of such components. For waveguides in silicon, the characteristics such as losses and spot-sizes are given, showing that silicon could be an attractive candidate for integrated optical devices

Keywords

Ge-Si alloys; elemental semiconductors; integrated optics; optical communication equipment; optical fabrication; optical losses; optical planar waveguides; reviews; semiconductor heterojunctions; semiconductor materials; silicon; silicon-on-insulator; Si; Si-SiGe; Si-SiO₂; SiGe; SiGe-heterostructures; active components; fabrication; integrated optical devices; integrated optics; losses; passive components; reviews; spot-sizes; waveguides; Electromagnetic wave absorption; Integrated optics; Optical devices; Optical losses; Optical materials; Optical receivers; Optical refraction; Optical waveguides; Photodiodes; Silicon;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.541223

Filename

541223