A CMOS ultrasound range-finder microsystem

Author

Kuratli, Christoph ; Huang, Qiuting

Author_Institution

Integrated Syst. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland

Volume

35

Issue

12

fYear

2000

Firstpage

2005

Lastpage

2017

Abstract

A miniaturized ultrasound range finder in a standard 0.8-/spl mu/m CMOS technology is described. It uses thermally excited silicon membrane transducers to generate or detect ultrasound at 100 kHz and can measure distances up to 11 cm with an accuracy of 2.5 mm. The distance sensor is based on a quasi-continuous measurement requiring coherent ultrasound waves, that are delivered by an electro-mechanical phase locked loop. Circuit and system techniques as well as package considerations are presented which allow the range finder to be implemented as a fully integrated 0.8-/spl mu/m CMOS microsystem.

Keywords

CMOS integrated circuits; distance measurement; integrated circuit packaging; microsensors; ultrasonic transducers; 0 to 11 cm; 0.8 micron; 100 kHz; CMOS; coherent ultrasound waves; distance sensor; electro-mechanical phase locked loop; package considerations; quasi-continuous measurement; thermally excited membrane transducers; ultrasound range-finder microsystem; Biomembranes; CMOS technology; Circuits and systems; Integrated circuit measurements; Phase locked loops; Phase measurement; Silicon; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.890317

Filename

890317