DocumentCode :
141835
Title :
A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage
Author :
Won Ho Choi ; Satapathy, Saroj ; Keane, John ; Kim, Chul Han
Author_Institution :
Univ. of Minnesota, Minneapolis, MN, USA
fYear :
2014
fDate :
15-17 Sept. 2014
Firstpage :
1
Lastpage :
4
Abstract :
We propose a test circuit for characterizing Plasma-Induced Damage (PID) based on a ring oscillator array for collecting high-quality BTI statistics. Two types of ring oscillators, PID protected and PID damaged, with built-in antenna structures were designed to separate PID from other effects. A beat frequency (BF) detection scheme was adopted to achieve high frequency measurement precision (>0.01%) in a short measurement time (>1μs) to prevent unwanted BTI recovery. The proposed circuit enables accurate PID-induced BTI lifetime prediction with different Antenna Ratios (ARs) in any type of device with any topology of antenna structure under any fabrication process. Measured frequency statistics from a 65nm test chip shows a 1.15% shift in the average frequency as a result of PID.
Keywords :
CMOS integrated circuits; circuit reliability; integrated circuit testing; negative bias temperature instability; oscillators; plasma materials processing; statistical analysis; PID damaged; PID protected; PID-induced BTI lifetime prediction; antenna ratios; beat frequency detection scheme; built-in antenna structures; high frequency measurement precision; high-quality BTI statistics; plasma-induced damage; ring oscillator array; size 65 nm; test circuit; unwanted BTI recovery; Antenna measurements; Antennas; Degradation; Frequency measurement; Semiconductor device measurement; Stress; Voltage measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Custom Integrated Circuits Conference (CICC), 2014 IEEE Proceedings of the
Conference_Location :
San Jose, CA
Type :
conf
DOI :
10.1109/CICC.2014.6945996
Filename :
6945996
Link To Document :
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