Mixed-element decomposition method for three-dimensional grid adaptation

Author

Leitner, Ernst ; Selberherr, Siegfried

Author_Institution

Inst. for Microelectron., Tech. Univ. Wien, Austria

Volume

17

Issue

7

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

561

Lastpage

572

Abstract

A new method for adaptive tessellation of three-dimensional (3-D) grids is presented. A mixed-element decomposition method is introduced for local refinement of fully unstructured grids, consisting of tetrahedra and octahedra. The method preserves the shape of the elements of the initial grid and therefore the element quality. Furthermore, local anisotropies of the initial grid are preserved. The developed implementation allows efficient adaptation and is used in a finite element program for simulation of thermal diffusion processes

Keywords

finite element analysis; mesh generation; semiconductor process modelling; thermal diffusion; IC processing; adaptive tessellation; finite element simulation; local anisotropy; local refinement; mixed-element decomposition; thermal diffusion; three-dimensional grid adaptation; Analytical models; Anisotropic magnetoresistance; Circuit simulation; Computational modeling; Diffusion processes; Doping profiles; Finite element methods; Geometry; Mesh generation; Shape;

fLanguage

English

Journal_Title

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on

Publisher

ieee

ISSN

0278-0070

Type

jour

DOI

10.1109/43.709394

Filename

709394