• DocumentCode
    141980
  • Title

    Dark current in standard CMOS pinned photodiodes for Time-of-Flight sensors

  • Author

    Illade-Quinteiro, J. ; Brea, V.M. ; Lopez, Pierre ; Blanco-Filgueira, Beatriz ; Cabello, D. ; Domenech-Asensi, G.

  • Author_Institution
    Centro de Investig. en Tecnoloxias da Informacion (CITIUS), Univ. of Santiago de Compostela, Santiago de Compostela, Spain
  • fYear
    2014
  • fDate
    18-18 April 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper deals with the optimal design of pinned photodiodes on standard CMOS technologies for Time-of-Flight sensors with the twofold objective of minimizing the dark current while ensuring an optimal charge transfer. The results are verified through CAD simulations with realistic doping profiles for a standard 0.18 μm CMOS technology. To the best of our knowledge, no similar analysis have been previously reported in the literature.
  • Keywords
    CMOS integrated circuits; charge exchange; doping profiles; leakage currents; p-i-n photodiodes; CAD simulations; CMOS pinned photodiodes; charge transfer; dark current; doping profiles; size 0.18 mum; time-of-flight sensors; CMOS integrated circuits; CMOS technology; Dark current; Photodiodes; Semiconductor device modeling; Semiconductor process modeling; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics And Electron Devices (WMED), 2014 IEEE Workshop On
  • Conference_Location
    Boise, ID
  • ISSN
    1947-3834
  • Print_ISBN
    978-1-4799-2222-2
  • Type

    conf

  • DOI
    10.1109/WMED.2014.6818726
  • Filename
    6818726