Fabrication of optical device arrays using patterned growth of ZnO nanostructures

An on-site catalyst-free and seedless synthesis method is presented for patterned growth of ZnO nanostructures and easy integration into arrayed microdevices. The optoelectronic ZnO devices, exhibiting Schottky diode behavior, are highly sensitive to UV illumination. We demonstrate that the patterned synthesis method combined with conventional lithography provides a facile way of fabricating arrayed UV sensory or switch devices with large on/off ratio and rapid on/off response.