Optimal design and noise consideration of micromachined vibrating rate gyroscope with modulated integrative differential optical sensing

Author

Degani, Ofir ; Seter, Dan J. ; Socher, Eran ; Kaldor, Shmuel ; Nemirovsky, Yael

Author_Institution

Kidron Microelectron. Res. Center, Technion-Israel Inst. of Technol., Haifa, Israel

Volume

7

Issue

3

fYear

1998

fDate

9/1/1998 12:00:00 AM

Firstpage

329

Lastpage

338

Abstract

A novel design of a micromachined vibrating rate gyroscope is presented. The rate gyroscope consists of a suspended proof mass which is attached by indium bumps to a CMOS chip. The proof mass is excited to vibration by electrostatic force. The displacements due to rate are sensed optically, using CMOS-integrated photodiodes and analog electronics. System considerations, including the mechanical behaviour, optical sensing, electronics, and noise sources of the rate gyroscope, are discussed. An expression for the noise equivalent rate (NER) of the system is obtained in order to derive an optimal design approach for the rate gyroscope. Optimal design and simulations of a case study of a rate gyroscope are presented. The device shows the ability of sensing 1 deg/h even at moderate quality factors of the order of 5000 and low-excitation voltages of 2.25 V

Keywords

CMOS integrated circuits; Q-factor; gyroscopes; integrated circuit design; integrated circuit noise; micromachining; micromechanical devices; photodiodes; 2.25 V; CMOS chip; electrostatic force; integrated photodiodes; low-excitation voltages; mechanical behaviour; micromachined vibrating rate gyroscope; modulated integrative differential optical sensing; noise equivalent rate; noise sources; optimal design approach; quality factors; suspended proof mass; Electrostatic measurements; Gyroscopes; Indium; Optical design; Optical modulation; Optical noise; Optical sensors; Photodiodes; Vibrations; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.709652

Filename

709652