New topic session 7B: Challenges and opportunities in test and design for test (DFT) of MEMS sensors

MEMS sensors are driving the internet of things and the market for MEMS is growing rapidly. In many MEMS products, test strategies are not standardized, proprietary, and considered important intellectual property. However, an eco-system is beginning to form as equipment makers are developing dedicated MEMS test equipment and test houses offer services for testing MEMS. This talk describes the challenges and opportunities for MEMS testing. Current MEMS testing is compared to the established methods of VLSI test. The talk further describes how design for test concepts can be applied to MEMS design. Finally, testing MEMS integrated within larger systems is highlighted.