DocumentCode :
1420809
Title :
Enhancing Mass Transport for Synthesizing Single-Walled Carbon Nanotubes via Micro Chemical Vapor Deposition
Author :
Zhou, Qin ; Lin, Liwei
Author_Institution :
Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, CA, USA
Volume :
20
Issue :
1
fYear :
2011
Firstpage :
9
Lastpage :
11
Abstract :
Miniaturization is introduced as a novel methodology to enhance mass transport in a chemical vapor deposition process. As a result, amorphous carbon formation during the synthesis of single-walled carbon nanotubes (SWNTs) can be deterred. Miniaturization also maintains a laminar flow pattern to ensure a stable growth condition. A system with micrometer-sized reaction chambers has been constructed to experimentally verify this concept. The results show that clean and small-diameter SWNTs with approximately millimeter length can be quickly synthesized using ethylene as the source gas. Similar experimental parameters in a conventional large-scale system failed to produce SWNTs with comparable quality due to catalyst poisoning.
Keywords :
carbon nanotubes; chemical vapour deposition; laminar flow; microfabrication; microfluidics; nanofabrication; C; SWNT synthesis; chemical vapor deposition process; ethylene gas; laminar flow pattern; mass transport; microchemical vapor deposition; micrometer-sized reaction chamber; single-walled carbon nanotubes; Carbon nanotube; chemical vapor deposition (CVD); microelectromechanical system;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2010.2100035
Filename :
5682001
Link To Document :
بازگشت