Title :
Design of a phase-shifting optical feedback interferometer using an electrooptic modulator
Author :
Servagent, Noël ; Bosch, Thierry ; Lescure, Marc
Author_Institution :
Dept. of Autom. Control & Prod. Syst., Ecole des Mines, Nancy, France
Abstract :
A laser sensor using optical feedback interferometry has been designed to measure displacements up to several micrometers. For this purpose, a lithium niobate crystal generates a phase shift in order to modulate at a frequency of 580 kHz the optical path difference between the sensor and the target. This setup has been calibrated by means of a commercial optical fiber sensor. The overall accuracy resulting is better than 65 nm for a 1-kHz sinusoidal motion of the target at 10 cm away from the sensor.
Keywords :
calibration; displacement measurement; electro-optical modulation; fibre optic sensors; light interferometers; lithium compounds; optical design techniques; optical feedback; optical materials; optical phase shifters; 1 kHz; 10 cm; 580 kHz; LiNbO/sub 3/; LiNbO/sub 3/ crystal; accuracy; calibration; commercial optical fiber sensor; design; displacements; electrooptic modulator; laser sensor; optical feedback interferometry; optical path difference; phase shift; phase-shifting optical feedback interferometer; sensor; sinusoidal motion; target; target motion; Displacement measurement; Interferometric lithography; Laser feedback; Lithium niobate; Optical design; Optical feedback; Optical interferometry; Optical sensors; Phase modulation; Phase shifting interferometry;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.892620
