• DocumentCode
    1421149
  • Title

    Growth of Ga _{bm 2} O _{bm 3} Nanowires and the Fabrication of Solar-Blind Photodetector

  • Author

    Weng, W.Y. ; Hsueh, T.J. ; Chang, S.J. ; Huang, G.J. ; Hung, S.C.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    10
  • Issue
    5
  • fYear
    2011
  • Firstpage
    1047
  • Lastpage
    1052
  • Abstract
    The authors report the growth of nanowires by heating the GaN/sapphire template. It was found that density, average length, and average diameter of the nanowires all increased as we increased the grown temperature. It was also found that β-Ga2O 3 nanowires with good crystal quality could be achieved only at high temperatures (i.e., 1050 and 1100 °C). Solar-blind β-Ga2O 3 nanowire photodetector was also fabricated by depositing interdigitated contact electrodes. With an incident light wavelength of 255 nm and an applied bias of 5 V, it was found that measured responsivity of the photodetector was 3.72×10-1 mA/W.
  • Keywords
    gallium compounds; nanofabrication; nanowires; photodetectors; semiconductor growth; semiconductor materials; Ga2O3; average diameter; average length; crystal quality; density; growth temperature; interdigitated contact electrode; nanowire; responsivity; solar-blind photodetector; temperature 1050 degC; temperature 1100 degC; voltage 5 V; wavelength 255 nm; Crystals; Electrodes; Gallium nitride; Gold; Nanowires; Photodetectors; Temperature measurement; Ga$_2$O$_3$ ; nanowires; ultraviolet (UV) photodetectors (PDs);
  • fLanguage
    English
  • Journal_Title
    Nanotechnology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1536-125X
  • Type

    jour

  • DOI
    10.1109/TNANO.2011.2104366
  • Filename
    5682052