Ferrofluid-Impregnated Paper Actuators

Author

Ding, Zhenwen ; Wei, Pinghung ; Chitnis, Girish ; Ziaie, Babak

Author_Institution

Dept. of Phys., Purdue Univ., West Lafayette, IN, USA

Volume

20

Issue

1

fYear

2011

Firstpage

59

Lastpage

64

Abstract

In this paper, we report on an inexpensive method of fabricating miniature magnetic actuators using ferrofluid impregnated paper. Different types of papers (including soft tissue paper, cleanroom paper, Whatman-1 filter paper, printer paper, and newspaper) were loaded with oil-based ferrofluid, microma-chined by a CO₂ laser and coated with a thin layer of parylene-C. The soaking capability of the different papers was investigated, with the soft tissue paper having the highest loading capacity, being able to absorb ferrofluid by as much as six times its original weight. Cantilever actuators fabricated from cleanroom and filter papers were able to generate the largest force (>; 40-mg equiva lent force), whereas the soft-tissue-paper cantilevers provided the greatest deflection (40° tip angle).

Keywords

carbon compounds; electromagnetic actuators; magnetic fluids; micromachining; CO₂; Whatman-1 filter paper; cantilever actuators; cleanroom paper; ferrofluid-impregnated paper actuators; laser; micromachine; miniature magnetic actuators fabrication; newspaper; oil-based ferrofluid; parylene-C; printer paper; soft-tissue-paper cantilevers; Cellulose; ferrofluid; magnetic actuators; paper; parylene; smart materials;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2010.2100026

Filename

5685241