MEMS-based integrated head/actuator/slider for hard disk drives

Author

Imamura, Takahiro ; Katayama, Masaki ; Ikegawa, Yukinori ; Ohwe, Takeshi ; Koishi, Ryosuke ; Koshikawa, Takao

Author_Institution

File Memory Lab., Fujitsu Labs. Ltd., Atsugi, Japan

Volume

3

Issue

3

fYear

1998

fDate

9/1/1998 12:00:00 AM

Firstpage

166

Lastpage

174

Abstract

We propose a new integrated head/actuator/slider concept for hard disk drives. This slider is batch fabricated on the sacrificial layer of a wafer together with an electrostatic microactuator via micromachining technology. We present the basic integrated head/actuator/slider design, the fabrication and flying-height tests of a micromachined slider body, and the design, fabrication, and testing of a prototype electrostatic microactuator. Slider warpage was analyzed and successfully suppressed to within 0.1 μm. The slider was flown over a glass disk at heights of 26-81 nm and at linear velocities of 5-13 m/s. The test results of the electrostatic microactuator showed a stroke of 0.55 μm, a very high mechanical resonant frequency of 34 kHz due to its low moving mass of 0.85 μg, and a large force, estimated to be 21.3 μN, generated by the actuator

Keywords

electrostatic devices; hard discs; mechatronics; microactuators; micromachining; 0.55 micron; 26 to 81 nm; 34 kHz; 5 to 13 m/s; electrostatic microactuator; fabrication; hard disk drives; head slider; microelectromechanical systems; micromachining; Electrostatic actuators; Fabrication; Frequency estimation; Glass; Hard disks; Microactuators; Micromachining; Prototypes; Resonant frequency; Testing;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/3516.712112

Filename

712112