• DocumentCode
    1424600
  • Title

    An automated meniscus coating system for polymer deposition on large-area MCM-D and MCM-L substrates

  • Author

    Bhattacharya, Swapan K. ; Bhatevara, Sachin ; Morales, Hector ; Kauffman, Sherlon ; Kamen, Edward ; May, Gary

  • Author_Institution
    Georgia Institute of Technology
  • Volume
    23
  • Issue
    4
  • fYear
    2000
  • Firstpage
    236
  • Lastpage
    236
  • Keywords
    Application specific integrated circuits; Circuit testing; Coatings; Costs; Dielectric substrates; Integrated circuit testing; Polymer films; Semiconductor device testing; Surface resistance; Throughput;
  • fLanguage
    English
  • Journal_Title
    Electronics Packaging Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-334X
  • Type

    jour

  • DOI
    10.1109/TEPM.2000.895056
  • Filename
    895056
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1424600