Title :
An automated meniscus coating system for polymer deposition on large-area MCM-D and MCM-L substrates
Author :
Bhattacharya, Swapan K. ; Bhatevara, Sachin ; Morales, Hector ; Kauffman, Sherlon ; Kamen, Edward ; May, Gary
Author_Institution :
Georgia Institute of Technology
Keywords :
Application specific integrated circuits; Circuit testing; Coatings; Costs; Dielectric substrates; Integrated circuit testing; Polymer films; Semiconductor device testing; Surface resistance; Throughput;
Journal_Title :
Electronics Packaging Manufacturing, IEEE Transactions on
DOI :
10.1109/TEPM.2000.895056
