DocumentCode :
1425599
Title :
Lamellar-Grating-Based MEMS Fourier Transform Spectrometer
Author :
Seren, Huseyin R. ; Holmstrom, Sven ; Ayerden, N. Pelin ; Sharma, Jaibir ; Urey, Hakan
Author_Institution :
Koc Univ., Istanbul, Turkey
Volume :
21
Issue :
2
fYear :
2012
fDate :
4/1/2012 12:00:00 AM
Firstpage :
331
Lastpage :
339
Abstract :
Design, fabrication, and characterization of a high-performance micromachined lamellar-grating-interferometer-based Fourier transform spectrometer are presented. The device is designed to give high deflections with very low dynamic deformation and good mode separation. Mechanical self-stoppers are introduced to withstand accelerations larger than 500 g due to shock. The clear aperture area of the grating is about 10 mm2. The maximum deflection while electrostatically actuated at ambient conditions is ±356 μm at 71.2 V and 340 Hz, setting a record for comparable devices. At a pressure of 8.6 Pa, the same deflection is reached at 4.3 V. Six hundred eighty spectra per second can be recorded with a resolution of 14 cm-1. With a HeNe laser at 633 nm, a spectral resolution of 0.54 nm (22 cm-1) is reached using electrostatic actuation. The microelectromechanical systems device is integrated into a compact Fourier transform spectrometer setup including a blackbody source, an infrared (IR) detector, and a visible laser using the device back side for reference. Early results with IR interferograms are also reported. In addition, the devices are actuated with pressure waves in the ambient air to reach deflections up to ±700 μm. With this setup, the spectrum of a red laser is measured with a resolution of 0.3 nm (12.4 cm-1).
Keywords :
Fourier transform spectroscopy; Michelson interferometers; blackbody radiation; diffraction gratings; electrostatic actuators; infrared detectors; infrared spectroscopy; micromechanical devices; Fourier transform spectrometer; blackbody source; compact Fourier transform spectrometer setup; device back side; dynamic deformation; electrostatic actuation; frequency 340 Hz; high-performance micromachined lamellar-grating-interferometer; infrared detector; infrared interferograms; mechanical self-stopper; microelectromechanical systems device; pressure 8.6 Pa; pressure waves; visible laser; voltage 4.3 V; voltage 71.2 V; wavelength 0.3 nm; wavelength 0.54 nm; wavelength 356 mum; wavelength 633 nm; Fabrication; Finite element methods; Gratings; Micromechanical devices; Optical interferometry; Resonant frequency; Springs; Fourier transform spectroscopy (FTS); infrared (IR) spectroscopy; interferometer; lamellar grating; microoptoelectromechanical systems;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2011.2180362
Filename :
6134625
Link To Document :
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