Engineering applications of plasma science

Author

Gilmore, Mark

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

17

Issue

3

fYear

1998

Firstpage

4

Lastpage

8

Abstract

Plasmas are important in such diverse fields as astrophysics, controlled fusion research, semiconductor manufacturing and laser technology. Plasma science incorporates skills from electromagnetics, thermodynamics, materials science, chemistry, electronics, mechanical design, vacuum technology and computer modeling. Plasma is involved in up to 30% of the steps in fabricating today´s microprocessors. Microwave tubes are a multibillion dollar market worldwide. Plasma processing within integrated circuit manufacturing is a $2 billion/year industry in the United States alone. The author discusses some engineering applications of plasma science, including: etching; deposition/coating; surface treatment; microwave vacuum tubes; pollution and hazardous waste processing; lasers; coronas

Keywords

corona; fusion reactors; microwave tubes; plasma CVD; plasma CVD coatings; plasma applications; plasma confinement; pollution control; sputter etching; surface treatment; vacuum tubes; astrophysics; chemistry; coating; computer modeling; controlled fusion research; coronas; deposition; electromagnetics; electronics; engineering applications; etching; hazardous waste processing; integrated circuit manufacture; laser technology; lasers; materials science; mechanical design; microprocessors; microwave tubes; microwave vacuum tubes; plasma processing; plasma science; pollution; semiconductor manufacturing; surface treatment; thermodynamics; vacuum technology; Application software; Chemical technology; Integrated circuit technology; Laser theory; Masers; Materials science and technology; Nuclear and plasma sciences; Plasma applications; Plasma chemistry; Plasma materials processing;

fLanguage

English

Journal_Title

Potentials, IEEE

Publisher

ieee

ISSN

0278-6648

Type

jour

DOI

10.1109/45.714609

Filename

714609