Title :
Observations of vibration shape of AT-cut quartz resonator including electric twins
Author :
Kamiyama, E. ; Itoh, Takayuki ; Murakami, Yasutaka ; Ueoka, Yoshihiro
Author_Institution :
Mitsubishi Mater. Silicon Corp., Chiba, Japan
Abstract :
Quartz crystal resonators, including electric twins, are investigated. Electric twins are artificially formed in the usual AT-cut quartz crystal resonator before the deposition of electrodes. We have directly observed that vibrations generated at electrodes propagate into the outside region isotropically, but cannot propagate into the region of the electric twin.
Keywords :
crystal resonators; electrodes; quartz; vibrations; AT-cut quartz resonator; SiO/sub 2/; electric twins; electrodes; quartz crystal resonators; vibration shape observations; Circuits; Crystalline materials; Electrodes; Etching; Frequency; Mobile communication; Optical resonators; Oscillators; Shape; Temperature dependence;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
