DocumentCode :
1427597
Title :
Robust Repetitive Controller for Fast AFM Imaging
Author :
Necipoglu, Serkan ; Cebeci, Selman A. ; Has, Y. Emre ; Guvenc, Levent ; Basdogan, Cagatay
Author_Institution :
Dept. of Mech. Eng., Istanbul Tech. Univ., Istanbul, Turkey
Volume :
10
Issue :
5
fYear :
2011
Firstpage :
1074
Lastpage :
1082
Abstract :
Currently, atomic force microscopy (AFM) is the most preferred scanning probe microscopy method due to its numerous advantages. However, increasing the scanning speed and reducing the interaction forces between the probe´s tip and the sample surface are still the two main challenges in AFM. To meet these challenges, we take advantage of the fact that the lateral movements performed during an AFM scan are a repetitive motion and propose a repetitive controller (RC) for the z-axis movements of the piezoscanner. The RC utilizes the profile of the previous scan line while scanning the current line to achieve a better scan performance. The results of the scanning experiments performed with our AFM setup show that the proposed RC significantly outperforms a conventional PI controller that is typically used for the same task. The scan error and the average tapping forces are reduced by 66% and 58%, respectively, when the scanning speed is increased by sevenfold.
Keywords :
PI control; atomic force microscopy; motion control; robust control; PI controller; atomic force microscopy; fast AFM imaging; robust repetitive controller; scanning probe microscopy method; z-axis movements; Bandwidth; Low pass filters; Mechatronics; Probes; Resonant frequency; Sensitivity; Surface topography; Atomic force microscopy (AFM); nanoscanning; repetitive controller (RC); system identification;
fLanguage :
English
Journal_Title :
Nanotechnology, IEEE Transactions on
Publisher :
ieee
ISSN :
1536-125X
Type :
jour
DOI :
10.1109/TNANO.2011.2106797
Filename :
5688327
Link To Document :
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