DocumentCode :
1427904
Title :
Direct generation of optical diffractive elements in perfluorocyclobutane (PFCB) polymers by soft lithography
Author :
Shah, H. ; Smith, D., Jr. ; Ballato, J. ; Foulger, S. ; Deguzman, P. ; Nordin, G.
Author_Institution :
Dept. of Chem., Clemson Univ., SC, USA
Volume :
12
Issue :
12
fYear :
2000
Firstpage :
1650
Lastpage :
1652
Abstract :
Optically diffractive line gratings with 0.58-μm feature sizes have been generated in 100-μm perfluorocyclobutane (PFCB) polymer films by direct micromolding using only a silicon master. Strong reflectivities from the green to red portions of the visible spectrum, depending on incident beam angle, were observed with 3 dB bandwidths of approximately 30 nm. This "negative mold-free" technique permits, for the first time to our knowledge, feature reproduction at submicrometer size scales, eliminates several steps from conventional soft lithographic methods, and marks itself as a practical means for rapidly generating planar photonic structures that operate spectrally in the visible and the near IR telecommunication bands.
Keywords :
diffraction gratings; diffractive optical elements; moulding; optical communication; optical fabrication; optical films; optical planar waveguides; optical polymers; photolithography; polymer films; 0.58 mum; 100 mum; Si master; bandwidths; conventional soft lithographic method; direct micromolding; feature reproduction; feature sizes; green region; incident beam angle; near IR telecommunication bands; negative mold-free technique; optical diffractive elements; optically diffractive line gratings; perfluorocyclobutane polymer films; perfluorocyclobutane polymers; planar photonic structures; red region; reflectivities; soft lithography; submicrometer size scales; visible spectrum; visible telecommunication bands; Chemical technology; Fiber nonlinear optics; Materials science and technology; Nonlinear optics; Optical attenuators; Optical diffraction; Optical materials; Optical polymers; Optical refraction; Optical variables control;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/68.896337
Filename :
896337
Link To Document :
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