DocumentCode
1428113
Title
Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators
Author
Rosa, M.A. ; Dimitrijev, S. ; Harrison, H.B.
Author_Institution
Sch. of Microelectron. Eng., Griffith Univ., Brisbane, Qld., Australia
Volume
34
Issue
18
fYear
1998
fDate
9/3/1998 12:00:00 AM
Firstpage
1787
Lastpage
1788
Abstract
A new comb finger design which enhances the operational performance of the commonly used electrostatic comb-drive actuator is presented. The angled comb finger design is discussed and shown experimentally to produce a greater actuating force than conventional rectangular comb fingers. Displacements up to twice as large as that achieved using rectangular comb fingers are shown for the same applied voltage
Keywords
electrostatic devices; microactuators; MEMS; actuating force; angled comb finger design; applied voltage; electrostatic comb-drive actuators; electrostatic force generation capability;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19981230
Filename
715391
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