High-speed imaging by electromagnetic alloy actuated probe with dual spring

This paper describes a magnetically actuated cantilever with dual spring (cantilevered actuator and torsional cantilever) for a high-speed imaging of atomic force microscopy (AFM). A fabricated cantilever beam with a high resonant frequency is successfully actuated by electromagnetic force. A planar coil is placed on the free end of the cantilever beam and embedded in a groove formed on the silicon cantilever to get a large deflection. Static and dynamic mechanical characteristics of the fabricated probes have been measured. The experimental results of the mechanical properties are compared with the calculation results obtained from a finite element method. When flowing a current of /spl plusmn/10 mA, a static deflection of /spl plusmn/2 can be achieved by a cantilever with a length of 400 /spl mu/m. The scanning speed of AFM is increased up to 1 mm/s by actuating the high resonant frequency cantilever in constant force mode.