Title :
Electro–Mechano–Fluidic Modeling of Microsystems Using Finite Elements
Author :
Rochus, V. ; Gutschmidt, S. ; Cardona, A. ; Geuzaine, C.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing micro-systems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.
Keywords :
Poisson ratio; Young´s modulus; cantilevers; damping; electromechanical effects; finite element analysis; microactuators; microfluidics; micromechanical resonators; behaviour laws; cantilever beam; electric fields; electrically-actuated microsystems; electromechanofluidic modeling; electrostatic force; finite element simulations; fluid damping; fluidic fields; magnetic fields; mechanical fields; microresonator; surface forces; surface-volume ratio; thermal fields; Atmospheric modeling; Couplings; Damping; Equations; Mathematical model; Numerical models; Structural beams; Electromagnetic forces; electromechanical sensors; finite element methods; nonlinear dynamical systems; scientific computing;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2173663
