Title :
A low-voltage actuated micromachined microwave switch using torsion springs and leverage
Author :
Dooyoung Hah ; Songcheol Hong
Author_Institution :
Dept. of Electr. Eng. & Comput., Korea Adv. Inst. of Sci. & Technol., Taejon
fDate :
12/1/2000 12:00:00 AM
Abstract :
In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is ~5 V. The insertion loss of ~1 dB and the isolation as high as ~40 dB at 1 GHz are achieved by the push-pull operation
Keywords :
electrostatic actuators; micromachining; microwave switches; torque; torsion; 1 dB; 4 GHz; 5 V; GaAs; LV actuated micromachined switch; insertion loss; leverage; low-voltage microwave switch; micromachined microwave switch; push-pull operation; torsion springs; Capacitance; Communication switching; Contacts; Electrodes; Insertion loss; Micromachining; Microwave devices; Springs; Switches; Voltage;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
