Title :
AlGaInP visible laser diodes grown on misoriented substrates
Author :
Hamada, Hiroki ; Shono, Masayuki ; Honda, Shoji ; Hiroyama, Ryoji ; Yodoshi, Keiichi ; Yamaguchi, Takao
Author_Institution :
Sanyo Electr. Co. Ltd., Osaka, Japan
fDate :
6/1/1991 12:00:00 AM
Abstract :
(AlxGa1-x)0.5In0.5P epitaxial layers and the basic characteristics of AlGaInP laser diodes grown on misoriented substrates by metalorganic chemical-vapor deposition (MOCVD) are described. Using (100) GaAs substrates with a misorientation of 5-7° toward the [011] direction, the bandgap energy of the epitaxial layers was about 50-60 meV wider than that for (100) substrates. A p-carrier concentration that was twice that of (100) substrates was obtained. The transverse-mode stabilized laser diodes oscillating at 655-7 nm were obtained without adding Al to the active layer. The maximum continuous-wave (CW) light output power was 25 mW. The maximum CW operation temperature and characteristic temperature were 85°C and ~100 K, respectively. The laser diodes have been operating reliably for more than 3000 h under 3 mW at 50°C. By adding an Al composition of X=0.15 to the active laser and using a 7° misoriented substrate a room-temperature CW operation wavelength of 631 nm was obtained
Keywords :
III-V semiconductors; aluminium compounds; gallium compounds; indium compounds; laser transitions; semiconductor growth; semiconductor junction lasers; vapour phase epitaxial growth; (AlxGa1-x)0.5In0.5P epitaxial layers; 100 K; 25 mW; 3 mW; 3000 h; 50 degC; 631 nm; 655 to 657 nm; 85 degC; AlGaInP; AlGaInP visible laser diodes; CW light output power; CW operation temperature; III-V semiconductor; MOCVD; bandgap energy; characteristic temperature; epitaxial layers; metalorganic chemical-vapor deposition; misoriented substrates; p-carrier concentration; transverse-mode stabilized laser diodes; Artificial intelligence; Chemical lasers; Diode lasers; Epitaxial layers; Gallium arsenide; MOCVD; Photonic band gap; Power generation; Substrates; Temperature;
Journal_Title :
Quantum Electronics, IEEE Journal of