Experimental analysis of pull-out voltage of electrostatically actuated microcantilever beam based on contact-stiction model

Author

Chakraborty, Shiladri ; Bhattacharya, Avik ; Bhattacharyya, Tarun Kanti

Author_Institution

Dept. of Electron. & Electr. Commun. Eng., Indian Inst. of Technol., Kharagpur, India

Volume

6

Issue

1

fYear

2011

fDate

1/1/2011 12:00:00 AM

Firstpage

43

Lastpage

47

Abstract

The effects of stiction forces on the pull-out voltage of electrostatically actuated microcantilever beams have been theoretically and experimentally investigated. An analytical method to estimate the pull-out voltage of microcantilevers under the presence of stiction forces along with electrostatic forces has been presented based on Euler Bernoulli beam model. The stiction effects of van der Waals force and Casimir force have been incorporated along with the electrostatic force in the Euler Bernoulli equation and the results have been numerically evaluated to predict the pull-out voltage. The theoretical results have been compared with experimental results through experimental investigation of the voltage transfer characteristics of the cantilever.

Keywords

cantilevers; microswitches; stiction; Casimir force; Euler Bernoulli beam model; contact-stiction model; electrostatically actuated microcantilever beam; microcantilever switches; pull-out voltage; stiction forces; van der Waals force; voltage transfer characteristics;

fLanguage

English

Journal_Title

Micro & Nano Letters, IET

Publisher

iet

ISSN

1750-0443

Type

jour

DOI

10.1049/mnl.2010.0125

Filename

5696822