EUV and Soft X-Ray Quantum Efficiency Measurements of a Thinned Back-Illuminated CMOS Active Pixel Sensor

Author

Stern, Robert A. ; Shing, Lawrence ; Waltham, Nick ; Mapson-Menard, Helen ; Harris, Andrew ; Pool, Peter

Author_Institution

Solar & Astrophys. Lab., Lockheed Martin Adv. Technol. Center, Palo Alto, CA, USA

Volume

32

Issue

3

fYear

2011

fDate

3/1/2011 12:00:00 AM

Firstpage

354

Lastpage

356

Abstract

We report the first absolute effective quantum efficiency (e-h pairs collected/predicted) measurements of a monolithic thinned back-illuminated CMOS active pixel sensor (APS) in the extreme ultraviolet and soft X-ray region (13-600 Å). The sensor was designed and fabricated under a joint Rutherford Appleton Laboratory/e2v research program and characterized in the Lockheed Martin Solar and Astrophysics calibration facility. We compare our QE results to the data and models developed for thinned CCDs with similar back surface passivation. Our results demonstrate that CMOS APS arrays show significant promise for use in space-based solar physics and astrophysics missions.

Keywords

CMOS image sensors; ion implantation; laser beam annealing; EUV; soft X-ray quantum efficiency measurements; thinned back-illuminated CMOS active pixel sensor; Active pixel sensors (APSs); X-ray astronomy detectors; image sensors; ultraviolet detectors;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2010.2100362

Filename

5699340