DocumentCode
1433617
Title
Online computer control of an evaporation process
Author
Steiner, D.J. ; Sandoz, D.J.
Author_Institution
University of Liverpool, Department of Electrical Engineering & Electronics, Liverpool, UK
Volume
121
Issue
8
fYear
1974
fDate
8/1/1974 12:00:00 AM
Firstpage
893
Lastpage
898
Abstract
The paper describes the application of single-input/single-output discrete linear-control theory to control the evaporation of various dielectric material in a vacuum chamber. The process is modelled using a recursive least-squares method and a controller is designed from the model. Process nonlinearity is shown to inhibit the performance of linear feedback control. A compensation is introduced to overcome this difficulty, and an effective final control design is achieved.
Keywords
control engineering applications of computers; dielectric materials; evaporation; process control; vapour deposition; evaporation process; online computer control; process control; vacuum deposition;
fLanguage
English
Journal_Title
Electrical Engineers, Proceedings of the Institution of
Publisher
iet
ISSN
0020-3270
Type
jour
DOI
10.1049/piee.1974.0206
Filename
5251678
Link To Document