Title :
Frequency shifts in plate crystal resonators induced by electric, magnetic, or mechanical fields in surface films
Author :
Nan Liu ; Jiashi Yang ; Yuantai Hu ; Xuedong Chen ; Wei Jiang
Author_Institution :
Dept. of Mech. & Mater. Eng., Univ. of Nebraska, Lincoln, NE, USA
fDate :
12/1/2011 12:00:00 AM
Abstract :
We study frequency shifts in plate crystal resonators with surface films. The films are multiphysical, including the effects of inertia, stiffness, intrinsic stress, piezoelectric coupling, and piezomagnetic coupling. Mindlin´s two-dimensional equations for a crystal plate with two elastic surface films are generalized to include the multiphysical effects of the films. They are used to study thickness-shear vibrations of a rotated Y-cut quartz plate with initial fields resulting from the mechanical, electric, and magnetic fields in the surface films. Frequency shifts caused by the initial fields are calculated and examined. Results show that plate crystal resonators with multiphysical surface films may be used for electric/magnetic field sensing.
Keywords :
crystal resonators; elastic constants; elasticity; quartz; thin films; vibrations; Mindlin two-dimensional equation; elastic surface films; electric field sensing device; frequency shift; intrinsic stress; magnetic field sensing device; piezoelectric coupling; piezomagnetic coupling; plate crystal resonator; rotated Y-cut quartz plate; stiffness; thickness-shear vibration; Crystals; Equations; Films; Mathematical model; Resonant frequency; Strain; Stress; Computer Simulation; Computer-Aided Design; Electromagnetic Fields; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Models, Theoretical; Stress, Mechanical; Surface Properties; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2011.2122
