DocumentCode :
1433794
Title :
Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 bragg reflector
Author :
Berge, J. ; Gevorgian, S.
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
Volume :
58
Issue :
12
fYear :
2011
fDate :
12/1/2011 12:00:00 AM
Firstpage :
2768
Lastpage :
2771
Abstract :
A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba0.25Sr0.75TiO3 thin film and an all-dielectric HfO2/SiO2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.
Keywords :
acoustic resonators; acoustic waves; barium compounds; dielectric thin films; electromechanical effects; hafnium compounds; silicon compounds; strontium compounds; Ba0.25Sr0.75TiO3-HfO2-SiO2; dielectric Bragg reflector; electromechanical coupling coefficient; nonconductive Bragg reflector stack; paraelectric phase; thin films; tunable bulk acoustic wave resonator; Acoustic waves; Electrodes; Frequency measurement; Hafnium compounds; Impedance; Resonant frequency; Acoustics; Ceramics; Equipment Design; Equipment Failure Analysis; Lenses; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Refractometry; Sound; Transducers;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2011.2142
Filename :
6141170
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1433794
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