• DocumentCode
    1433794
  • Title

    Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 bragg reflector

  • Author

    Berge, J. ; Gevorgian, S.

  • Author_Institution
    Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
  • Volume
    58
  • Issue
    12
  • fYear
    2011
  • fDate
    12/1/2011 12:00:00 AM
  • Firstpage
    2768
  • Lastpage
    2771
  • Abstract
    A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba0.25Sr0.75TiO3 thin film and an all-dielectric HfO2/SiO2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.
  • Keywords
    acoustic resonators; acoustic waves; barium compounds; dielectric thin films; electromechanical effects; hafnium compounds; silicon compounds; strontium compounds; Ba0.25Sr0.75TiO3-HfO2-SiO2; dielectric Bragg reflector; electromechanical coupling coefficient; nonconductive Bragg reflector stack; paraelectric phase; thin films; tunable bulk acoustic wave resonator; Acoustic waves; Electrodes; Frequency measurement; Hafnium compounds; Impedance; Resonant frequency; Acoustics; Ceramics; Equipment Design; Equipment Failure Analysis; Lenses; Membranes, Artificial; Micro-Electrical-Mechanical Systems; Refractometry; Sound; Transducers;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2011.2142
  • Filename
    6141170
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1433794