Title :
Performance characterization for an excimer laser solid-state pulsed power module (SSPPM) after 20B shots
Author :
Ness, Richard ; Melcher, Paul C. ; Smith, Brett ; Partlo, William N. ; Birx, Daniel
Author_Institution :
CYMER Inc., San Diego, CA, USA
fDate :
10/1/2000 12:00:00 AM
Abstract :
An experiment has been designed to characterize a solid-state pulsed power module (SSPPM) during the initial manufacturing cycle and then repeat the same characterization measurements after the module has gone through several sequences of 10B shots of normal operation in an excimer laser. The goal of such an experiment is to determine what, if any, degradation occurs during these extended periods and to assist in the development of expected module lifetimes that can then be used to estimate the cost of operation of the overall excimer laser. Initial component and subassembly measurements include the capacitance and Q of energy storage capacitors; the inductance and Q of bias, charging, and energy recovery inductors; the B-H characteristics of magnetic cores; insulation breakdown strength; connection resistance; and the general physical appearance of the unit. Operational measurements also compare the efficiency of each pulse compression stage, the repeatability and accuracy of diagnostics, thermal management parameters, and the recovery and on-state characteristics of the silicon-controlled rectifiers (SCRs) and diodes. Each of these items is monitored before testing and after each sequence of 10B shots has been completed. Results of the experiment are described
Keywords :
capacitor switching; excimer lasers; laser accessories; power semiconductor diodes; pulse compression; pulse generators; pulsed power supplies; solid-state rectifiers; 10B shots; 20B shots; B-H characteristics; Q; Si; Si-controlled diodes; Si-controlled rectifiers; bias; capacitance; characterization measurements; charging; component measurements; connection resistance; cost of operation; degradation; diagnostics; energy recovery inductors; energy storage capacitors; excimer laser; excimer laser solid-state pulsed power module; expected module lifetimes; extended periods; general physical appearance; insulation breakdown strength; magnetic cores; manufacturing cycle; normal operation; on-state characteristics; operational measurements; performance characterization; pulse compression stage; recovery; repeatability; solid-state pulsed power module; subassembly measurements; testing; thermal management parameters; Electrical resistance measurement; Manufacturing; Multichip modules; Optical design; Optical pulses; Power measurement; Pulse measurements; Solid lasers; Solid state circuits; Thermal management;
Journal_Title :
Plasma Science, IEEE Transactions on