Title :
Self Heated Thermo-Resistive Element Hot Wire Anemometer
Author :
Adamec, Richard Jozef ; Thiel, David Victor
Author_Institution :
Sch. of Eng., Griffith Univ., Gold Coast, QLD, Australia
fDate :
4/1/2010 12:00:00 AM
Abstract :
A microelectromechanical systems (MEMS) hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The excitation of the elements to the point of self heating allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives air velocity, and the temperature differential of each element pair is used for wind direction calculation and has demonstrated a sensing resolution better than 1% and a repeatability better than 2%.
Keywords :
anemometers; micromechanical devices; power consumption; MEMS; differential bridge configuration; microelectromechanical systems; power consumption; self heated thermoresistive element hot wire anemometer; thermoresistive elements; Energy consumption; Fluid flow measurement; Heating; Microelectromechanical systems; Sensor arrays; Silicon; Temperature sensors; Thermal sensors; Thermoresistivity; Wire; Anemometer; hot-wire; microelectromechanical systems (MEMS);
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2009.2035518
