DocumentCode
1435166
Title
Self Heated Thermo-Resistive Element Hot Wire Anemometer
Author
Adamec, Richard Jozef ; Thiel, David Victor
Author_Institution
Sch. of Eng., Griffith Univ., Gold Coast, QLD, Australia
Volume
10
Issue
4
fYear
2010
fDate
4/1/2010 12:00:00 AM
Firstpage
847
Lastpage
848
Abstract
A microelectromechanical systems (MEMS) hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The excitation of the elements to the point of self heating allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives air velocity, and the temperature differential of each element pair is used for wind direction calculation and has demonstrated a sensing resolution better than 1% and a repeatability better than 2%.
Keywords
anemometers; micromechanical devices; power consumption; MEMS; differential bridge configuration; microelectromechanical systems; power consumption; self heated thermoresistive element hot wire anemometer; thermoresistive elements; Energy consumption; Fluid flow measurement; Heating; Microelectromechanical systems; Sensor arrays; Silicon; Temperature sensors; Thermal sensors; Thermoresistivity; Wire; Anemometer; hot-wire; microelectromechanical systems (MEMS);
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2009.2035518
Filename
5427264
Link To Document