Title :
Microelectromechanical structures for materials research materials research society symposium proceedings, vol. 518 [Book Reviews]
Keywords :
Automatic control; Books; Crystalline materials; Instruments; Internet; Java; Microelectromechanical systems; Microelectronics; Micromechanical devices; Testing;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2001.901625