Title :
Organic-inorganic materials for integrated optoelectronics
Author :
Fardad, M.A. ; Fallahi, M.
Author_Institution :
Opt. Sci. Center, Arizona Univ., Tucson, AZ, USA
fDate :
10/1/1998 12:00:00 AM
Abstract :
A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss
Keywords :
coating techniques; integrated optoelectronics; optical fabrication; optical planar waveguides; sol-gel processing; channel waveguides; integrated optoelectronics; organic-inorganic materials; organoaluminosilicate; photoinscribing; photosensitive materials; sol-gel process; solvent assisted photolithographic process; spin coating;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19981360
