Title :
A determination of the electron distribution function near absorbing surfaces
Author :
Petrov, George Marinov ; Petrova, Tzvetelina
Author_Institution :
Berkeley Res. Associates, Springfield, VA, USA
fDate :
12/1/2000 12:00:00 AM
Abstract :
A precise description of the electron distribution function near absorbing surfaces has been obtained based on the solution of the inhomogeneous electron Boltzmann equation. The absorbing surface creates a large gradient of the electron distribution function that consequently leads to an axial variation of the electron density and other electron transport parameters. The axial variation of the electron distribution function is investigated and compared for rare gases and nitrogen and the impact of the higher order terms in Legendre polynomial expansion is discussed
Keywords :
Boltzmann equation; Legendre polynomials; electron mobility; glow discharges; inert gases; nitrogen; plasma transport processes; Legendre polynomial expansion; N2; absorbing surfaces; electron density; electron distribution function; electron transport parameters; glow discharges; inert gases; inhomogeneous electron Boltzmann equation; rare gases; Argon; Boltzmann equation; Distribution functions; Electron mobility; Gases; Helium; Nonuniform electric fields; Polynomials; Surface discharges; Surface treatment;
Journal_Title :
Plasma Science, IEEE Transactions on
