Title :
Gallium-doped sol-gel glass waveguides on Si substrates by SC-RTA
Author :
Schneider, V.M. ; Syms, R.R.A.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
9/17/1998 12:00:00 AM
Abstract :
The fabrication of silica-on-silicon channel guides by spin-coating and rapid thermal annealing (SC-RTA) of sol-gel glass doped with gallium, germanium and phosphorus oxides is described, and methods of depositing clear, crack-free films are discussed. Low loss is only obtained for lightly-doped guides with controlled process temperatures
Keywords :
coating techniques; gallium compounds; germanate glasses; optical planar waveguides; phosphosilicate glasses; rapid thermal annealing; sol-gel processing; GeO2-P2O5-SiO2:Ga 2O3; SC-RTA; Si; channel guides; controlled process temperatures; crack-free films; germanophosphosilicate glass; lightly-doped guides; rapid thermal annealing; sol-gel glass waveguides; spin-coating;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19981238
