Title :
Low-threshold multiple-wavelength vertical-cavity laser arrays obtained by postgrowth wet oxidation
Author :
Fiore, A. ; Akulova, Y.A. ; Ko, J. ; Hegblom, E.R. ; Coldren, L.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
fDate :
9/17/1998 12:00:00 AM
Abstract :
A mask-defined array of multiple-wavelength vertical-cavity surface-emitting lasers with submilliamp threshold currents over a 22 nm wavelength span has been fabricated with a single epitaxial growth on a conventional substrate. Tuning is achieved by using the combination of lateral and vertical wet oxidation of an AlGaAs layer inside the cavity
Keywords :
laser tuning; oxidation; semiconductor laser arrays; surface emitting lasers; AlGaAs; laser tuning; lateral wet oxidation; low-threshold multiple-wavelength vertical-cavity laser arrays; mask-defined array; postgrowth wet oxidation; single epitaxial growth; submilliamp threshold currents; vertical wet oxidation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19981193
