Title :
Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes
Author :
Park, S.-J. ; Chen, J. ; Liu, C. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
fDate :
2/1/2001 12:00:00 AM
Abstract :
Microdischarge devices having (50-100 μm)2 pyramidal Si anodes and metal screen cathodes have been operated continuously at Ne gas pressures up to 1350 Torr and voltages below 95 V. More than 34 μW of output power is produced by a single device in a solid angle of ~5×10-2 sr for a Ne pressure of 500 Torr. 3×3 arrays of these devices have been fabricated
Keywords :
elemental semiconductors; glow discharges; mesoscopic systems; semiconductor plasma; silicon; 1350 torr; 34 muW; Si; metal screen cathodes; microdischarge device arrays; output power; screen cathodes; solid angle; square pyramidal anodes;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010086
