Title :
Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays
Author :
Jung, Jae Hoon ; Ju, Byeong Kwon ; Kim, Hoon ; Lee, Yun Hi ; Chung, Suk Jae ; Jang, Jin ; Oh, Myung Hwan
fDate :
10/1/1998 12:00:00 AM
Abstract :
We have studied the electron emission characteristics of Mo field emitter arrays (FEAs) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20 nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 μA. Also the gate voltage required to get the anode current of 0.1 (μA/emitter) decreases from 77 to 48 V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of noncoated Mo FEAs
Keywords :
carbon; electron field emission; molybdenum; plasma CVD coatings; stability; vacuum microelectronics; 20 nm; 30 V; 48 V; 831 muA; C-Mo; DLC film deposition; Mo field emitter arrays; PECVD coating; anode current; chemical vapor deposition; diamond-like carbon coating; electron emission characteristics; emission current stability improvement; gate voltage; layer-by-layer technique; maximum emission current; molybdenum FEA; plasma enhanced CVD; turnon voltage reduction; Chemical vapor deposition; Coatings; Diamond-like carbon; Electron emission; Electron guns; Field emitter arrays; Flat panel displays; Plasma chemistry; Plasma properties; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
