Title :
Semiconductor-based electret sensors for sound and pressure
Author :
Voorthuyzen, J.A. ; Bergveld, P. ; Sprenkels, A.J.
Author_Institution :
Twente Univ., Enschede, Netherlands
fDate :
4/1/1989 12:00:00 AM
Abstract :
The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 μV/Pa in the required frequency range of 0 to 100 Hz
Keywords :
electrets; integrated circuit technology; microphones; pressure transducers; 0 to 10 kHz; catheter-tip blood-pressure measurements; electret microphone; experimental results; frequency range; hearing-aids; integrated sensors; pressure sensitivity; pressure sensor; semiconductor-based electret sensors; theory; Acoustic sensors; Air gaps; Capacitive sensors; Electrets; Impedance; Mechanical factors; Mechanical sensors; Micromachining; Microphones; Silicon;
Journal_Title :
Electrical Insulation, IEEE Transactions on
