Title :
Linear-Stiffness Rotary MEMS Stage
Author :
Baran, Utku ; Davis, Wyatt O. ; Holmström, Sven ; Brown, Dean ; Sharma, Jaibir ; Gokce, Sertan Kutal ; Urey, Hakan
Author_Institution :
Dept. of Electr. & Electron. Eng., Koc Univ., Istanbul, Turkey
fDate :
6/1/2012 12:00:00 AM
Abstract :
A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to ±7° mechanical scan angle is achievable with the new suspension design.
Keywords :
bending; micromechanical devices; springs (mechanical); suspensions (mechanical components); bending flexure spring design; linear motion; linear stiffness; linear-stiffness rotary MEMS stage; mechanical scan angle; suspended body; suspension design; Actuators; Laser beams; Linearity; Micromechanical devices; Resonant frequency; Springs; Suspensions; Comb drive; linear spring; low-frequency laser beam scanning; microelectromechanical systems (MEMS) stage;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2011.2182504
