DocumentCode :
1439672
Title :
Inductively coupled surface acoustic wave device for sensor application
Author :
Beck, Klaus ; Wohlfahrt, Matthias ; Rügemer, Angelika ; Reiss, Sebastian ; Von Schickfus, Manfred ; Hunklinger, Siegfried
Author_Institution :
Inst. fur Angewandte Phys., Heidelberg Univ., Germany
Volume :
45
Issue :
5
fYear :
1998
Firstpage :
1140
Lastpage :
1144
Abstract :
We present a new type of surface acoustic wave device for sensor applications where the need for bonding wires is eliminated. Instead the device is coupled inductively to the RF circuitry. The impedance of such devices and the necessary matching have been investigated both theoretically and experimentally. The devices have repeatedly been operated at temperatures up to 400/spl deg/C and have shown a good temperature resistance. In order to test the suitability of the new concept for sensor applications, several devices with an operating frequency of 363 MHz were coated with copper phthalocyanine for the detection of NO/sub 2/. From these measurements we derive a detection limit of these devices below 1 ppb for NO/sub 2/.
Keywords :
gas sensors; nitrogen compounds; surface acoustic wave sensors; 0 to 400 degC; 363 MHz; NO/sub 2/; bonding wires; detection limit; gas detection; inductively coupled surface acoustic wave device; operating frequency; sensor application; temperature resistance; Acoustic sensors; Acoustic waves; Bonding; Circuit testing; Coupling circuits; Radio frequency; Surface acoustic wave devices; Surface impedance; Temperature sensors; Wires;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.726436
Filename :
726436
Link To Document :
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