PZT thin film actuated elastic fin micromotor

Author

Dubois, Marc-Alexandre ; Muralt, Paul

Author_Institution

Lab. de Ceramique, Fed. Inst. of Technol., Lausanne, Switzerland

Volume

45

Issue

5

fYear

1998

Firstpage

1169

Lastpage

1177

Abstract

A piezoelectric elastic fin micromotor based on a PbZr/sub 0.53/Ti/sub 0.47/O/sub 3/ thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 /spl mu/Nm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%.

Keywords

clocks; elemental semiconductors; lead compounds; microactuators; micromotors; piezoceramics; piezoelectric actuators; power supplies to apparatus; silicon; 0.17 percent; 4.8 percent; PZT thin film actuator; PbZr/sub 0.53/Ti/sub 0.47/O/sub 3/; PbZr/sub 0.53/Ti/sub 0.47/O/sub 3/ thin film; Si; Si micromachined membrane; acceleration; angular velocity; efficiency; interferometry; laser set-up; output power; piezoelectric elastic fin micromotor; stator; torque; wristwatch application; Angular velocity; Biomembranes; Interferometry; Micromotors; Piezoelectric films; Semiconductor thin films; Silicon; Stators; Transistors; Velocity measurement;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.726440

Filename

726440