DocumentCode :
1439791
Title :
Mass sensitivity of acoustic plate mode in liquids
Author :
Teston, Franck ; Feuillard, Guy ; Tessier, Loïc ; Lethiecq, Marc
Author_Institution :
GIP Ultrasons/Lussi, Toura, France
Volume :
45
Issue :
5
fYear :
1998
Firstpage :
1266
Lastpage :
1272
Abstract :
In this paper, the concept of electrical effective permittivity function is used to calculate the eigen-frequencies and the particle displacements of piezoelectric acoustic plate modes (APM). These results allowed us to determine the mass sensitivities of the first order vibration modes using a first order perturbation theory. Theoretical results are discussed and compared to those of a variational method and isotropic two-layer composite analysis in the case of a shear horizontal APM sensor on a singly rotated cut quartz substrate. Experimental measurements by a copper electrodeposition are carried out and show that the perturbation method leads to a better understanding of the APM behavior.
Keywords :
acoustic wave propagation; copper; eigenvalues and eigenfunctions; electrodeposition; mass measurement; microsensors; permittivity; perturbation theory; piezoelectric transducers; quartz; substrates; surface acoustic wave sensors; surface acoustic waves; variational techniques; Cu; Cu electrodeposition; SiO/sub 2/; acoustic plate mode; eigen-frequencies; electrical effective permittivity function; first order perturbation theory; first order vibration modes; isotropic two-layer composite analysis; mass sensitivity; particle displacements; perturbation method; piezoelectric acoustic plate modes; shear horizontal APM sensor; singly rotated cut quartz substrate; variational method; Acoustic applications; Acoustic devices; Acoustic propagation; Acoustic sensors; Acoustic testing; Acoustic waves; Copper; Equations; Liquids; Permittivity;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.726453
Filename :
726453
Link To Document :
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