Vertically coupled microring resonators using polymer wafer bonding

Author

Absil, P.P. ; Hryniewicz, J.V. ; Little, B.E. ; Johnson, F.G. ; Ritter, K.J. ; Ho, P.-T.

Author_Institution

Lab. for Phys. Sci., Maryland Univ., College Park, MD, USA

Volume

13

Issue

1

fYear

2001

Firstpage

49

Lastpage

51

Abstract

A new technique is presented to make vertically coupled semiconductor microring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments. Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with Qs greater than 3000 and an on-resonance channel extinction greater than 12 dB. A 1/spl times/4 multiplexer/demultiplexer crossbar array with second-order microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.

Keywords

etching; micro-optics; molecular beam epitaxial growth; multiplexing equipment; optical fabrication; optical planar waveguides; optical resonators; optical waveguide filters; photolithography; wafer bonding; wavelength division multiplexing; MBE; WDM; etching; fabrication process; large-scale integrated optics; low channel-to-channel crosstalk; multiplexer/demultiplexer crossbar array; on-resonance channel extinction; photolithography; polymer wafer bonding; ring-to-waveguide misalignment robustness; second-order microrings; semiconductor microring resonators; single-mode microring optical channel dropping filters; vertically coupled microring resonators; Optical device fabrication; Optical filters; Optical resonators; Optical waveguides; Optical wavelength conversion; Polymers; Resonator filters; Substrates; Wafer bonding; Wet etching;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.903217

Filename

903217