Demonstration of a monolithic multichannel module for multi-Gb/s intra-MCM optical interconnects

Author

Verschaffelt, G. ; Buczynski, R. ; Tuteleers, P. ; Vynck, P. ; Baukens, V. ; Ottevaere, H. ; Debaes, C. ; Kufner, S. ; Kufner, M. ; Hermanne, A. ; Genoe, J. ; Coppée, D. ; Vounckx, R. ; Borghs, S. ; Veretennicoff, I. ; Thienpont, H.

Author_Institution

Dept. of Appl. Phys. & Photon., Vrije Univ., Brussels, Belgium

Volume

10

Issue

11

fYear

1998

Firstpage

1629

Lastpage

1631

Abstract

In this letter, we report on the demonstration of a 2.48-Gb/s multichannel optical data-link for intramultichip module interconnects. The optical module was fabricated in polymethylmethacrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cylindrical lenses. With the same technology, we have also fabricated a single-channel optical bridge and used this component to demonstrate a proof-of-principle optical intrachip interconnect by establishing a digital data-link between optoelectronic transceivers integrated on the same chip.

Keywords

ion beam lithography; lenses; micromechanical devices; mirrors; multichip modules; optical fabrication; optical interconnections; optical polymers; optical receivers; optical transmitters; transceivers; 2.48 Gbit/s; Gb/s multichannel optical data-link; PMMA; cylindrical lenses; deep proton lithography; digital data-link; intramultichip module interconnects; micromirrors; monolithic multichannel module; monolithically integrates; multi-Gb/s intra-MCM optical interconnects; optical module; optoelectronic transceivers; polymethylmethacrylate; proof-of-principle optical intrachip interconnect; single-channel optical bridge fabrication; Integrated circuit interconnections; Integrated optics; Lenses; Micromirrors; Microoptics; Optical interconnections; Optical receivers; Optical refraction; Optical transmitters; Protons;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.726772

Filename

726772