Title :
Electronic structure theory and mechanisms of the oxide trapped hole annealing process
Author :
Karna, Shashi P. ; Pineda, Andrew C. ; Pugh, Robert D. ; Shedd, Walter M. ; Oldham, T.R., Jr.
Author_Institution :
Air Force Res. Lab., Kirtland AFB, NM, USA
fDate :
12/1/2000 12:00:00 AM
Abstract :
First principles quantum mechanical calculations on model SiO2 clusters support the Lelis model of reverse annealing in the oxide and provide the first electronic structure explanation of the process, suggesting that delocalized holes (Eδ´ centers) are annealed out permanently. Localized holes (Eγ ´ centers) form a metastable, dipolar complex, without restoring the Si-Si dimer bond upon electron trapping. In the presence of an applied negative field, these charge neutral, dipolar complexes, (Eγ´+e-), can readily release the weakly bonded electron, exhibiting a reverse annealing process
Keywords :
annealing; hole traps; silicon compounds; Eδ´ center; Eγ´ center; Lelis model; SiO2; atomic cluster model; electron trapping; electronic structure; first-principles quantum mechanical model; metastable dipolar complex; oxide trapped hole; reverse annealing; Annealing; Bonding; Charge carrier processes; Electron traps; Ionizing radiation; Laboratories; Metastasis; Quantum mechanics; Strontium; Temperature;
Journal_Title :
Nuclear Science, IEEE Transactions on