Fabrication and Response of Laser-Printed Cavity-Sealing Membranes

Author

Birnbaum, Andrew J. ; Zalalutdinov, Maxim K. ; Wahl, Kathryn J. ; Piqué, Alberto

Author_Institution

Mater. Sci. & Technol. Div., Naval Res. Lab., Washington, DC, USA

Volume

20

Issue

2

fYear

2011

fDate

4/1/2011 12:00:00 AM

Firstpage

436

Lastpage

440

Abstract

Freestanding micrometer-scale Ag membranes were laser printed via the laser decal transfer process without the use of sacrificial layers. Cross-sectional focused ion beam milling revealed uniform membrane thickness. Material and structural properties, including Young´s modulus E ≈ 40 GPa, residual stress σ₀ ≈ 61 MPa, and yield stress σ^y ≈ 110 MPa, were extracted via a coupled nanoindentation/flnite-element simulation approach. Dynamic characterization of membranes via laser vibrometry confirmed resonant frequencies in the megahertz regime with quality factors comparable to fully dense structures fabricated via traditional lithography.

Keywords

Q-factor; Young´s modulus; finite element analysis; focused ion beam technology; internal stresses; laser materials processing; lithography; membranes; micromechanical devices; milling; nanoindentation; yield stress; Young´s modulus; cross-sectional focused ion beam milling; dynamic characterization; flnite-element simulation; laser decal transfer process; laser vibrometry; laser-printed cavity-sealing membranes; lithography; membrane thickness; nanoindentation; quality factors; residual stress; yield stress; Biomembranes; Cavity resonators; Fabrication; Laboratories; Lasers; Stress; Finite elements; laser direct write; laser forward transfer; membranes; microelectromechanical systems (MEMS);

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2011.2105251

Filename

5709961